SMS Lithography

Soft Micro-Stencil Lithography

Project Title:
Developing soft micro-stencil (SMS) lithography for the fabrication of electrodes on nano-materials

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We developed a novel microfabrication procedure to construct metallic nanostructures by deposition through a suspended soft polymer stencil lithography mask. Our procedure, known as soft-micro stencil (SMS) lithography, can be applied to electrically characterize nanomaterials previously untestable with conventional methods. In addition to its immense utility in research settings, further refinement of the SMS may allow for its use in production or industry, increasing the adaptability and functionality of electronics such as displays, sensors, and artificial skins on non-planar surfaces.